11420E500100 Seminar

TOPIC
▸　Capacitive Micromachined Ultrasound Transducers (CMUT) on CMOS 

❝　I will deliver a presentation reporting our recent progress of CMOS-MEMS based capacitive micromachined ultrasound transducers (i.e., CMUT on CMOS), including design, modeling, simulation, fabrication, testing, and potential applications. This talk begins with a fabrication platform using CMOS 0.18 mm technology node and post-CMOS process with a special focus on realizing tiny gap and high electromechanical coupling resonant transducers to serve as a fundamental building block for acoustic/ultrasound sensing and actuation. Through this platform, capacitive resonant transducers with multiple-gap configurations can be implemented on the same chip to meet various demands raised by applications; for example, CMUT transmitter (TX) favors large gap spacing to enhance its driving efficiency while receiver (RX) necessitates tiny gap for low bias operation and high sensitivity. In the second part, CMUT which is designed and fabricated using such a platform will be introduced with its performance characterization and evaluation through a series of static and dynamic measurements. In addition, an ultrasonic pulse-echo testing (Time of Flight, ToF) and directivity verification of the proposed CMUT array on CMOS will be experimentally explored in both liquid and solid media. A special emphasis on CMUT vertically integrated with its readout IC to minimize parasitics and optimize form factor will also be demonstrated.　❞

SPEAKER
▸　Prof. Sheng-Shian Li
▸　Department of Power Mechanical Engineering, National Tsing Hua University

TIME
▸　2026/03/10 (TUE) 13:20 ~ 15:10

VENUE
▸　Classroom 201, Engineergin Building 1