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[COE Seminar] 2023/10/17: "Development Prospects of ALD Technology in Energy Applications" - Prof. Chih-Liang WANG, MSE/NTHU

11210E500100 College of Engineering Seminar

▸ Development Prospects of ALD Technology in Energy Applications

❝ The atomic layer deposition (ALD) has been regarded as a promising deposition technique due to its gas phase deposition processes based on self-limiting and saturated surface reactions, which enable to achieve a required film-based material conformally on the high aspect ratio geometry with precise composition and thickness control. The ALD technique is recently employed to develop the functional thin film with low cost and high performance in energy applications. In this presentation, the growth mechanism of ALD is explained firstly and followed by a brief overview of its potential applications in energy fields. Some examples studied in our lab will be then introduced in the seminar.

▸ Prof. Chih-Liang WANG
▸ Department of Materials Science and Engineering, National Tsing Hua University

▸ 2023/10/17 (TUE) 13:20 ~ 15:10

▸ Classroom 202, Chemical Engineering Building

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